منابع مشابه
Single-crystal Silicon Torsional Actuator Arrays for Micro Manipulation Tasks
Arrays of electrostatic MEMS actuators have been fabricated using a multi-layer SCREAM (Single-Crystal Reactive Etching and Metallization) process. The high aspect ratio single-crystal silicon (SCS) devices consist of released, torsionally suspended grids with tips. Experiments and calculations show that the actuator array is strong enough to move macroscopic parts. An individual actuator can g...
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Arrays of electrostatic MEMS actuators have been fabricated using a modi ed, multi-layer SCREAM (SingleCrystal Reactive Etching and Metallization) process. The devices consist of released, torsionally suspended grids with high aspect ratio single-crystal silicon (SCS) tips. They can be used to generate a force eld for the manipulation of small, at objects. Calculations and experiments show that...
متن کاملSingle - Crystal Silicon Actuator Arrays for Micro Manipulation
Arrays of electrostatic MEMS actuators have been fabricated using a modiied, multi-layer SCREAM (Single-Crystal Reactive Etching and Metallization) process. The devices consist of released, torsionally suspended grids with high aspect ratio single-crystal silicon (SCS) tips. They can be used to generate a force eld for the manipulation of small, at objects. Calculations and experiments show tha...
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The temperature dependence of magneto-optical and magneto-photoconductivity measurements were carried out in the range of (200-330) K. A home made optical cryostat was used for the measurements. The measured room temperature value of the energy gap was found to be 2.211 eV. The temperature coefficient of energy gap was found to be -5.48×10-4 eV/K obtained by the optical absorption method and -4...
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ژورنال
عنوان ژورنال: Materia Japan
سال: 1998
ISSN: 1340-2625,1884-5843
DOI: 10.2320/materia.37.55